Dielectric Properties of Multilayered Ferroelectric Thin Films Fabricated by Sol-Gel Method

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Abstract
Multilayered thin films of ferroelectric perovskites were fabricated by the sol-gel method. The investigated films were PbTiO3, PbZrO3, BaTiO3 and SrTiO3, and their multilayered films. The films were prepared by dipping and heating in air at 600–700° C. The microstructures and crystalline phases of the single component and their multilayered films were examined. The multilayered film of PbTiO3 and PbZrO3 has a very clear interface between the components, though that between PbTiO3 and SrTiO3 was not clear due to the diffusion of the lead component from the PbTiO3 layer into the SrTiO3 layer and the formation of a solid solution. The dielectric constant of the multilayered films and its dependence on temperature could not be explained by the series connection of those of the component films.