Issues on boron electrical activation in silicon: Experiments on boron clusters and shallow junctions formation
- 1 January 2002
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 186 (1-4) , 246-255
- https://doi.org/10.1016/s0168-583x(01)00903-x
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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