Role of hydrogen in the growth of hydrogenated microcrystalline silicon
- 1 May 1996
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 198-200, 931-934
- https://doi.org/10.1016/0022-3093(96)00089-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Role of Hydrogen Plasma during Growth of Hydrogenated Microcrystalline Silicon: In Situ UV-Visible and Infrared Ellipsometry StudyJapanese Journal of Applied Physics, 1994
- Two-photon laser-induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane dischargeJournal of Vacuum Science & Technology A, 1994
- Role of Hydrogen Atoms in the Formation Process of Hydrogenated Microcrystalline SiliconJapanese Journal of Applied Physics, 1990