A self-consistent numerical analysis of a planar dc magnetron discharge by the particle-in-cell/Monte Carlo method

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Abstract
The structure of axisymmetrical dc planar magnetron discharge is clarified by the use of the particle-in-cell/Monte Carlo method. The magnetron has two concentric cylindrical magnets behind the cathode. Here the effects of magnetization in the magnets, M, and the emission coefficient of secondary electrons, , on the discharge structure are examined. Four discharge conditions are considered: (i) M = 0.50 T and = 0.12, (ii) M = 0.75 T and = 0.12, (iii) M = 1.00 T, = 0.12 and (iv) M = 0.50 T and = 0.15. The complete steady states are obtained for the four cases; no oscillations or waves are found in the plasma. The electrical field component normal to the electrode varies greatly in the axial and radial directions near the cathode. The plasma-density profile exhibits a peak near the edge of the cathode sheath. As M or increases, the sheath thickness decreases. Also, the spatial distributions of the space charge, ion flux onto the cathode, ion mean kinetic energy and rates of inelastic collision of electrons are examined in detail.

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