Highly adhesive TiN thin films prepared on glass by the electron shower method
- 1 August 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 281-282, 311-313
- https://doi.org/10.1016/0040-6090(96)08639-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Characterisation of TiN films prepared by electron shower, arc ion‐plating and sputtering methodsAdvanced Materials for Optics and Electronics, 1995
- The effect of electronic excitation produced by an electron shower on the adhesion of copper films deposited on stainless steelApplied Surface Science, 1991
- Characteristics of titanium arc evaporation processesThin Solid Films, 1987