Microtechnology for space systems
- 27 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 409-418 vol.1
- https://doi.org/10.1109/aero.1998.686938
Abstract
Microelectromechanical systems (MEMS) are micron-to-millimeter size electromechanical devices that are fabricated using modified semiconductor batch-fabrication techniques. We believe that MEMS technology will have a significant impact on future space systems by (1) reducing the size, mass, power, and cost of individual sensors and actuators used throughout spacecraft and launch vehicles and (2) ultimately reducing overall spacecraft size. At the Aerospace Corporation, we are focusing on near and far-term applications of MEMS in space systems for reduced mass, improved performance, higher reliability, increased health and status awareness, and reduced life cycle costs. Specific tasks include the development of micro-propulsion technology for microsatellites (1-to-100 kg mass) and nanosatellites (1-to-1000 gram mass), the development of a flight-qualifiable GN&C (guidance, navigation, and control) unit using a GPS receiver and MEMS inertial sensors, and the development of a MEMS-based wireless multiparameter sensor.Keywords
This publication has 15 references indexed in Scilit:
- Design, analysis and fabrication of a vaporizing liquid micro-thrusterPublished by American Institute of Aeronautics and Astronautics (AIAA) ,1997
- Thruster options for microspacecraft - A review and evaluation of existing hardware and emerging technologiesPublished by American Institute of Aeronautics and Astronautics (AIAA) ,1997
- A performance evaluation of MEMS-based micronozzlesPublished by American Institute of Aeronautics and Astronautics (AIAA) ,1997
- Digital micromirror device and its application to projection displaysJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Silicon micromachining in the fabrication of biosensors using living cellsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Micro gears and turbines etched from siliconSensors and Actuators, 1987
- Performance characteristics of a planar ‘clark-type’ oxygen sensorSensors and Actuators, 1986
- The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1979
- Optimization of the Hydrazine‐Water Solution for Anisotropic Etching of Silicon in Integrated Circuit TechnologyJournal of the Electrochemical Society, 1975
- Anisotropic Etching of SiliconJournal of Applied Physics, 1969