A new silicon-on-glass process for integrated sensors
- 6 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A technology for high-performance single-crystal silicon-on-insulator transistorsIEEE Electron Device Letters, 1987
- Analysis of noise margin and speed of GaAs MESFET DCFL using UM-SPICEIEEE Transactions on Electron Devices, 1986
- The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1979