Silicon-hydrogen bonds in silicon oxide near the SiO2/Si interface
- 1 January 1992
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 56-58, 836-840
- https://doi.org/10.1016/0169-4332(92)90347-z
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
This publication has 3 references indexed in Scilit:
- Silicon-Hydrogen Bonds in Silicon Native Oxides Formed during Wet Chemical TreatmentsJapanese Journal of Applied Physics, 1990
- The Evolution of Silicon Wafer Cleaning TechnologyJournal of the Electrochemical Society, 1990
- Probing the transition layer at the SiO2-Si interface using core level photoemissionApplied Physics Letters, 1984