Dark-field electron microscopy of dissociated dislocations and surface steps in silicon using forbidden reflections

1 January 1983

journal article
research article
Published by Taylor & Francis in Philosophical Magazine A

Vol. 48 (1) , 139-153
https://doi.org/10.1080/01418618308234892

Abstract

Dissociated dislocations in (111) foils of silicon have been imaged in the forbidden reflection of type ⅓(422). Largo contrast effects are observed at stacking faults, and thickness fringes corresponding to changes of thickness of a repeat unit (3d₁₁₁) are revealed. The partial dislocations bounding the fault are observed as very narrow images. The contrast effects are explained in terms of kinematical theory, and the potential applications of this technique are discussed.

Keywords

This publication has 7 references indexed in Scilit:

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