MeV proton backscattering analysis of ion implanted polymers
- 1 April 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 15 (1-6) , 288-292
- https://doi.org/10.1016/0168-583x(86)90305-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- High energy ion beam modification of polymer filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Ion-beam-induced conductivity in polymer filmsJournal of Applied Physics, 1983
- Large conductivity changes in ion beam irradiated organic thin filmsApplied Physics Letters, 1982
- Ion beam lithographyNuclear Instruments and Methods in Physics Research, 1981
- Influence of molecular structure on stopping power of chemical species for helium(+) ions from a low-energy particle acceleratorAccounts of Chemical Research, 1980
- Ion beam exposure characteristics of resistsJournal of Vacuum Science and Technology, 1979