Gas sensitive field effect devices for high temperature
- 27 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 26 (1-3) , 165-169
- https://doi.org/10.1016/0925-4005(94)01579-7
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Evaluation of gas mixtures with high-temperature gas sensors based on silicon carbideSensors and Actuators B: Chemical, 1994
- Gas sensors for high temperature operation based on metal oxide silicon carbide (MOSiC) devicesSensors and Actuators B: Chemical, 1993
- Pt and PtSix Schottky contacts on n-type β-SiCJournal of Applied Physics, 1989
- Catalytic etching of platinum foils and thin films in hydrogen-oxygen mixturesThe Journal of Physical Chemistry, 1988
- Hydrogen induced drift in palladium gate metal-oxide-semiconductor structuresJournal of Applied Physics, 1984