Optical properties of ion implanted AINx
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4) , 742-745
- https://doi.org/10.1016/0168-583x(89)90888-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Properties of AlN films deposited on N-implanted AlNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Formation of Al-nitride films at room temperature by nitrogen ion implantation into aluminumJournal of Applied Physics, 1981