Structural characterization of amorphous hydrogenated carbon and carbon nitride films deposited by plasma-enhanced CVD
- 15 April 1995
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 4 (4) , 499-502
- https://doi.org/10.1016/0925-9635(94)05211-5
Abstract
No abstract availableKeywords
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