Analysis of process-induced charges created in MOSFETs and related collection test structures

Publisher Website

4 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/icmts.1990.161712

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Analysis of the charge pumping technique and its application for the evaluation of MOSFET degradation
IEEE Transactions on Electron Devices, 1989
A reliable approach to charge-pumping measurements in MOS transistors
IEEE Transactions on Electron Devices, 1984