e −-beam deposition of ZrO2-Sc2O3 films
- 1 March 1990
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 67 (5) , 2655-2657
- https://doi.org/10.1063/1.345476
Abstract
A new method is presented of depositing zirconia-scandia films following evaporation of the oxide powders using an electron beam. The relative amount of Sc was increased in steps from 0 to 8 at. %. In the ‘‘as-deposited’’ state, all films were amorphous, but crystallized following post-deposition heat treatments. As the atomic percent of Sc was increased, the tetragonal phase of zirconia was stabilized. It appeared as a single phase for compositions with more than 5 at. % Sc.This publication has 4 references indexed in Scilit:
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