Microfabrication techniques for chemical/biosensors
- 25 June 2003
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE
- Vol. 91 (6) , 839-863
- https://doi.org/10.1109/jproc.2003.813583
Abstract
Microfabrication processes for chemical and biochemical sensors are reviewed. Standard processing steps originating from semiconductor technology are detailed, and specific micromachining steps to fabricate three-dimensional mechanical structures are described. Fundamental chemical sensor principles are briefly abstracted and corresponding state-of-the-art examples of microfabricated chemical sensors and biosensors are given. The advantages and disadvantages of either fabricating devices in IC fabrication technology with additional microfabrication steps, or of using custom-designed nonstandard microfabrication process flows are debated. Finally, monolithic integrated chemical and biological microsensor systems are presented, which include transducer structures and operation circuitry on a single chip.Keywords
This publication has 146 references indexed in Scilit:
- Vertical comb-finger capacitive actuation and sensing for CMOS-MEMSSensors and Actuators A: Physical, 2002
- A high resolution IC-calorimeter for the determination of heats of absorption onto thin coatingsThermochimica Acta, 1999
- Polymeric resistive bridge gas sensor array driven by a standard cell CMOS current drive chipSensors and Actuators B: Chemical, 1999
- An artificial nose based on a micromechanical cantilever arrayAnalytica Chimica Acta, 1999
- Gas identification by modulating temperatures of SnO2-based thick film sensorsSensors and Actuators B: Chemical, 1997
- Thermoelectrical micro-calorimetry and microanalysis on free-standing membranesMicrochimica Acta, 1995
- Chemically modified field-effect transistors; potentiometric Ag+ selectivity of PVC membranes based on macrocyclic thioethersAnalytica Chimica Acta, 1993
- Chemically modified field-effect transistors; a sodium ion selective sensor based on calix[4]arene receptor moleculesAnalytica Chimica Acta, 1991
- All-silicon plate wave oscillator system for sensorsSensors and Actuators A: Physical, 1991
- Design and properties of a flow-injection analysis cell using potassium-selective ion-sensitive field-effect transistors as detection elementsAnalytica Chimica Acta, 1991