Preparation of Y-Ba-Cu-O Thin Films by Rf-Magnetron Sputtering
- 1 September 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (9A) , L1484
- https://doi.org/10.1143/jjap.26.l1484
Abstract
Thin films of Y-Ba-Cu-O compound are prepared by rf-magnetron sputtering technique. Superconductivity appears for those films annealed at 900-930°C. The best thin films exhibit superconducting onset at 86 K and complete zero resistance at 76 K. From the X-ray diffraction analysis, it is found that the films annealed at 920°C have a strong c-axis orientation perpendicular to the film surface. The observed X-ray intensities are in good qualitative agreement with the calculated ones. The results of SEM and Auger electron spectroscopy are also presented.Keywords
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