Volatile metallo-organic precursors for depositing inorganic electronic materials
- 30 April 1994
- journal article
- Published by Elsevier in Polyhedron
- Vol. 13 (8) , 1111-1121
- https://doi.org/10.1016/s0277-5387(00)80248-x
Abstract
No abstract availableThis publication has 100 references indexed in Scilit:
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