Thin film thickness determination with neutron activation analysis
- 1 July 2001
- journal article
- Published by Elsevier in Applied Radiation and Isotopes
- Vol. 55 (1) , 9-12
- https://doi.org/10.1016/s0969-8043(00)00335-3
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Analysis of aerosols at the bosporus bridge of IstanbulJournal of Radioanalytical and Nuclear Chemistry, 1998
- Ion beam analysis of ultrathin dielectric filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- Nuclear reaction analysis of thin fluorinated polymer filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- Thickness measurement of titanium nitride layers on steel using PIXE and proton backscatteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
- Depth profiling of deuterium using nuclear reaction analysisNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- NdF3 thin films grown on carbon substrates and analyzed by RBS, PIXE, RNRA, SEM and X-ray diffractionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Complementarity of RBS, PIGE and PIXE for the determination of surface layers of thicknesses up to 30 micronsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- An intercomparison of tantalum pentoxide reference studiesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Grazing X-ray reflectometry and Rutherford backscattering: Two complementary techniques for the study of thin film mixingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Photopeak method for the computer analysis of gamma-ray spectra from semiconductor detectorsNuclear Instruments and Methods, 1969