The influence of tensile forces on the deflection of circular diaphragms in pressure sensors
- 1 November 1984
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 6 (3) , 201-213
- https://doi.org/10.1016/0250-6874(84)80021-9
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Optimum design considerations for silicon pressure sensor using a four-terminal gaugeSensors and Actuators, 1983
- Integrated piezoresistive pressure sensor with both voltage and frequency outputSensors and Actuators, 1983
- Fiber-optic diaphragm-curvature pressure transducerOptics Letters, 1983
- Capacitive pressure transducers with integrated circuitsSensors and Actuators, 1983
- Frequency output piezoresistive pressure sensorSensors and Actuators, 1983
- A piezoresistive integrated pressure sensorSensors and Actuators, 1983
- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982
- Nonlinearity of the piezoresistance effect of p-type silicon diffused layersIEEE Transactions on Electron Devices, 1982
- A high-sensitivity integrated-circuit capacitive pressure transducerIEEE Transactions on Electron Devices, 1982
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979