Characterization of Ferroelectric Thin Films by ESCA

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Abstract
Electron spectroscopy for chemical analysis (ESCA) is well suited for investigating the surfaces of ferroelectric films. More importantly, this technique is valuable for ferroelectric films because, reduction of ions, such as Pb2+, Bi3+, and Ti4+ by photon beam is much less likely than probing electron and ion beams which are used in other methods. In the present paper a brief description of the possibilities of ESCA for determining qualitative and quantitative surface composition, and thickness of extremely thin films was presented. Special emphasis was given to multicomponent films, such as lead zirconate titanate (PZT). Factors that lead to considerable difference in the composition of the surface were discussed. Different depth profiling techniques using ESCA were also presented.

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