Vergrabene Nitrid-Schichten in Silicium f r Kalibrierproben zur quantitativen Auger-Elektronenspektrometrie (AES)
- 1 June 1984
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 319 (6-7) , 616-621
- https://doi.org/10.1007/bf01226734
Abstract
No abstract availableKeywords
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