Advances in interferometric optical profiling
- 30 April 1992
- journal article
- Published by Elsevier in International Journal of Machine Tools and Manufacture
- Vol. 32 (1-2) , 5-10
- https://doi.org/10.1016/0890-6955(92)90053-j
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Absolute measurement of surface roughnessApplied Optics, 1990
- Step height measurement using two-wavelength phase-shifting interferometryApplied Optics, 1987
- Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithmApplied Optics, 1987
- Use of an ac heterodyne lateral shear interferometer with real–time wavefront correction systemsApplied Optics, 1975