Electrostatic model for an asymmetric combdrive
- 1 March 2000
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 9 (1) , 126-135
- https://doi.org/10.1109/84.825787
Abstract
This paper presents an analytical solution to the electrostatic actuation of an asymmetric combdrive in out-of-plane and torsional motions. The exact solutions to force in the out-of-plane motion and the integral for torque in the torsional motion are obtained. The dependence of the peak force on the thickness of the movable fingers and the amount of overlap of the combs is given in closed form. Using our model, the shift of the natural resonant frequency due to a dc bias is analyzed. Furthermore, our solution also applies to the in-plane motion of an in-plane interdigitated combdrive. We found that an in-plane interdigitated combdrive generates a constant force within 0.1% when the minimum initial engagement length of the combs is twice the separation gap.Keywords
This publication has 9 references indexed in Scilit:
- Surface micromachined polysilicon accelerometerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Dual axis operation of a micromachined rate gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuatorJournal of Microelectromechanical Systems, 1999
- Surface-micromachined microoptical elements and systemsProceedings of the IEEE, 1998
- Surface micromachined microengineSensors and Actuators A: Physical, 1995
- Electrophysics of micromechanical comb actuatorsJournal of Microelectromechanical Systems, 1995
- Silicon-processed overhanging microgripperJournal of Microelectromechanical Systems, 1992
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990