Electrophysics of micromechanical comb actuators
- 1 March 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 4 (1) , 49-59
- https://doi.org/10.1109/84.365370
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Laterally driven polysilicon resonant microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003