Investigations on the ion energy distribution in an analytical radiofrequency glow discharge and its mass spectrometrical application
- 31 December 1997
- journal article
- Published by Elsevier in International Journal of Mass Spectrometry and Ion Processes
- Vol. 171 (1-3) , 183-189
- https://doi.org/10.1016/s0168-1176(97)00119-5
Abstract
No abstract availableKeywords
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