Mass spectrometric studies of positive ions in r.f. glow discharges
- 1 April 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 171 (1) , 65-80
- https://doi.org/10.1016/0040-6090(89)90034-5
Abstract
No abstract availableThis publication has 36 references indexed in Scilit:
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