{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
Top Cited Papers
- 1 July 2003
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 105 (2) , 162-170
- https://doi.org/10.1016/s0924-4247(03)00090-6
Abstract
No abstract availableKeywords
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