Ferroelectric thin films for micro-sensors and actuators: a review
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- 23 May 2000
- journal article
- review article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 10 (2) , 136-146
- https://doi.org/10.1088/0960-1317/10/2/307
Abstract
This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.Keywords
This publication has 78 references indexed in Scilit:
- Lead zirconate titanate cantilever for noncontact atomic force microscopyApplied Surface Science, 1999
- PZT thin film actuated elastic fin micromotorIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1998
- Gas spectrometry based on pyroelectric thin-film arrays integrated on siliconSensors and Actuators A: Physical, 1998
- Micromachined high frequency ferroelectric sonar transducersIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1997
- Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquidsJournal of Microelectromechanical Systems, 1997
- Piezoelectric cantilever beams actuated by PZT sol-gel thin filmSensors and Actuators A: Physical, 1996
- Application of lead zirconate titanate thin film displacement sensors for the atomic force microscopeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Fabrication and characterization of PZT thin-film vibrators for micromotorsSensors and Actuators A: Physical, 1995
- High resolution 50 nm linear displacement macroscale meander-line PZT actuatorElectronics Letters, 1993
- Piezoelectric micromotors for microrobotsJournal of Microelectromechanical Systems, 1992