Comparison between different imaging modes in focussed ion beam instruments
- 31 January 1996
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 30 (1-4) , 249-252
- https://doi.org/10.1016/0167-9317(95)00238-3
Abstract
No abstract availableKeywords
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- Coulomb effects in retarding field lensesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- An optimized two lens optical column for use with a liquid metal ion sourceMicroelectronic Engineering, 1987
- Comparison of optical design approaches for use with liquid metal ion sourcesJournal of Vacuum Science & Technology B, 1987