Coulomb interactions in microfocussed electron and ion beams
- 1 September 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 363 (1-2) , 220-224
- https://doi.org/10.1016/0168-9002(95)00260-x
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Brightness measurements of nanometer-sized field-emission-electron sourcesJournal of Applied Physics, 1993
- Aberration properties of focused ion-beam induced by space charge effectJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Coulomb interactions in a shaped ion beam pattern generatorJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Improvement of beam properties by optimizing ion optics and minimizing beam interactionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- The shower-beam conceptMicroelectronic Engineering, 1985
- A Monte Carlo calculation of the virtual source size for a liquid metal ion sourceJournal of Vacuum Science & Technology B, 1985
- Space charge effects in focused ion beamsJournal of Vacuum Science & Technology B, 1983
- Electron-beam broadening effects caused by discreteness of space chargeJournal of Vacuum Science and Technology, 1979
- Experimentelle Bestimmung der Energieverteilung in thermisch ausgelösten ElektronenstrahlenThe European Physical Journal A, 1954