A Direct Method For Measuring The Gate Oxide Capwi-hnces Of MOSFETS

Publisher Website

24 August 2005

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 45-48
https://doi.org/10.1109/icmts.1988.672927

Abstract

No abstract available

Keywords

This publication has 4 references indexed in Scilit:

A capacitance method to determine the gate-to-drain/Source overlap length of MOSFET's
IEEE Electron Device Letters, 1987
Precision measurement technique of integrated MOS capacitor mismatching using a simple on-chip circuit
IEEE Transactions on Electron Devices, 1986
Measurement of minimum-geometry MOS transistor capacitances
IEEE Transactions on Electron Devices, 1985
On-chip capacitance measurement circuits in VSLI structures
IEEE Transactions on Electron Devices, 1982