Raman spectroscopy on nitrogen-incorporated amorphous hydrogenated carbon films
- 1 April 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 241 (1-2) , 255-259
- https://doi.org/10.1016/0040-6090(94)90436-7
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Structural modifications in a-C:H films doped and implanted with nitrogenDiamond and Related Materials, 1994
- Characterization of hard amorphous carbon films implanted with nitrogen ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin filmsApplied Physics Letters, 1992
- Raman analysis of laser-annealed amorphous carbon filmsJournal of Applied Physics, 1992
- Properties of nitrogen-doped amorphous hydrogenated carbon filmsJournal of Applied Physics, 1991
- Real-time Raman measurements of graphite under Ar+ irradiationApplied Physics Letters, 1991
- Hard amorphous (diamond-like) carbonsProgress in Solid State Chemistry, 1991
- Raman scattering and hydrogen-content analysis of amorphous hydrogenated carbon films irradiated with 200-keVionsPhysical Review B, 1990
- Structural and optical properties of amorphous carbon nitrideSolid State Communications, 1988
- Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon filmsPhysical Review B, 1984