Thin YBCO films prepared by low-temperature spray pyrolysis

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Abstract
Thin YBCO films were prepared from aerosol by a low-temperature deposition process consisting of two steps-the deposition at atmospheric pressure and firing in vacuum degraded by partial pressure of oxygen-both at temperatures not exceeding 600 degrees C. A stoichiometric 1-2-3 aqueous nitrate solution of Y, Ba and Cu constituents was used as a source of aerosol. MgO and Al2O3 substrates were heated to 140 to 160 degrees C during deposition. The obtained films were 1 to 10 mu m thick with Tc>80 K and Jc=103 to 104 A cm-2. However, detailed TG, DTG and DTA studies performed by the authors and others showed that thermal decomposition of the nitrates used only starts at temperatures higher than 200 degrees C. The use of low substrate temperatures during deposition (140 to 160 degrees C in this case) is apparently the reason for rather low Jc values. Optimization of the preparation process is suggested, which could lead to higher Jc values at processing temperatures not exceeding 600 to 700 degrees C. Such temperatures are still interesting for substrates with elevated diffusivity into prepared films.