Manufacture of amorphous carbon layers by r.f. dense plasma CVD
- 15 April 1995
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 4 (4) , 302-303
- https://doi.org/10.1016/0925-9635(94)05203-4
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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