Metrological x-ray interferometry in the micrometre region
- 1 March 1996
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 7 (1) , 1-12
- https://doi.org/10.1088/0957-4484/7/1/001
Abstract
A `free-standing' microdisplacement calibrator is described which utilizes a previously proposed but untested design of monolithic x-ray interferometer. The monolith is driven by a twist-compensating electromagnetic actuator and a specially designed 1 ppm current source and is held, along with its x-ray source and detectors, within a desk-top-mounted radiation enclosure. It is confirmed that highly traceable displacements resolved to a small fraction of a nanometre can be obtained over a continuous range of at least under conditions typical of a routine metrology room. An overview of the system and its performance is given, but this paper concentrates particularly on the monolith design and on vibration suppressionKeywords
This publication has 9 references indexed in Scilit:
- A simple two-axis ultraprecision actuatorReview of Scientific Instruments, 1994
- The feasibility of extended range monolithic X-ray interferometric calibratorsNanotechnology, 1993
- The design and operation of monolithic X-ray interferometers for super-precision metrologyNanotechnology, 1991
- An Optimized Magnet-Coil Force Actuator and Its Application to Precision Elastic MechanismsProceedings of the Institution of Mechanical Engineers, Part C: Mechanical Engineering Science, 1990
- Sub-nanometre displacements calibration using X-ray interferometryMeasurement Science and Technology, 1990
- Phase measurement X-ray interferometryJournal of X-Ray Science and Technology, 1989
- X-ray interferometer calibration of microdisplacement transducersJournal of Physics E: Scientific Instruments, 1983
- Spherical-wave theory of the zero-absorption LLL X-ray or neutron interferometerJournal of Applied Crystallography, 1976
- Review lecture: Ten years of X-ray interferometryProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1975