X-ray-diffraction mapping of epitaxial thin films: Determination of in-plane epitaxy and a-, b-, and c-axis lengths in films with varying oxygen deficiency
- 1 February 1993
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 47 (6) , 3431-3434
- https://doi.org/10.1103/physrevb.47.3431
Abstract
Epitaxial thin films with varying oxygen content have been studied by x-ray-diffraction (XRD) mapping. Results show that the films have a high epitaxial quality with the a and b axes aligned in the [100] or [010] directions of the (001) substrate. The two twin domains in the orthorhombic films are present in equal amounts, both for the as-deposited and the oxygen-deficient films. From XRD maps of the (00l), (308), and (038) peaks, the a-, b-, and c-axis lengths were measured as a function of superconducting transition temperature . The results show that the unit-cell variation for relaxed epitaxial films agrees with that of bulk material.
Keywords
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