A multipurpose implanter with various target chambers for basic studies on the influence of ion bombardment on material properties
- 1 May 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 68 (1-4) , 402-407
- https://doi.org/10.1016/0168-583x(92)96113-d
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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