Segregation and desorption kinetics for evaporation of arsenic from silicon
- 1 August 1979
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 50 (8) , 5292-5295
- https://doi.org/10.1063/1.326626
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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