Modeling of pyrolytic laser-assisted chemical vapor deposition: Mass transfer and kinetic effects influencing the shape of the deposit

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Abstract
The laser-assisted chemical vapor deposition of metals is modeled. The case of pyrolytic deposition induced by a continuous laser source is considered. The heat transfer in the solid substrate is considered to be transient, while the gas-phase heat and mass transfer are assumed to be in the quasi-steady state. The model accommodates the use of temperature-dependent physical properties and the occurrence of irregularly shaped deposits. The modeling equations are solved by a finite element approach which is briefly described. Volcanolike deposits are predicted under certain conditions of gas pressure and laser intensity. Model predictions show that depletion effects and adsorption-desorption phenomena are major factors in influencing the occurrence of volcanolike deposits.

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