A Fully Self-Aligned Amorphous Silicon Tft Technology for Large Area Image Sensors and Active-Matrix Displays
- 1 January 1998
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The Effect of the Amorphous Silicon Alpha-Gamma Transition on Thin Film Transistor PerformanceMRS Proceedings, 1997
- a-Si TFT Technologies for AM-LCDSMRS Proceedings, 1994
- Amorphous Silicon Image Sensor ArraysMRS Proceedings, 1992
- A New Self-Aligned A-SI TFT Using Ion Doping and Chromium Silicide FormationMRS Proceedings, 1991