Observation of Surface Composition during ECR Discharge Cleaning in JFT-2M
- 1 March 1986
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 25 (3A) , L209-211
- https://doi.org/10.1143/jjap.25.l209
Abstract
Surface composition on a molybdenum sample has been observed during ECR discharge cleaning (ECR-DC) by Auger electron spectroscopy in JFT-2M. ECR-DC reduces oxygen levels to one-thrid of those before exposure within thirty minutes, and the molybdenum concentration increases up to a factor of three during ECR-DC. Carbon levels decrease once, then increase gradually. In the later phase Auger line shapes are similar to pure carbon. Sulfur, which appears under 120°C baking, surfaces from the stainless steel of the chamber as a result of the baking, and is sputtered by plasmas and deposited on the sample.Keywords
This publication has 11 references indexed in Scilit:
- Rate of Production of Water Vapour in Low-Power, High-Repetition-Rate Discharge CleaningJapanese Journal of Applied Physics, 1986
- Surface composition changes of inconel 625 during RG and ECR discharge cleaning of textor at 300°CJournal of Nuclear Materials, 1984
- Wall conditioning of the JIPP T-II torus by ac discharge cleaningJournal of Nuclear Materials, 1982
- Conditioning of asdex by glow dischargeJournal of Nuclear Materials, 1980
- A review of the wall problem and conditioning techniques for tokamaksJournal of Nuclear Materials, 1980
- Electron cyclotron resonance discharge cleaning of JFT-2 Tokamak (Jaeri)Journal of Nuclear Materials, 1980
- Wall conditioning by low power discharge in the ISX-A tokamakJournal of Vacuum Science and Technology, 1979
- Observations of changes in residual gas and surface composition with discharge cleaning in PLTJournal of Vacuum Science and Technology, 1979
- Trapping and removal of oxygen in tokamaksNuclear Fusion, 1977
- Auger electron spectroscopy studies of carbon overlayers on metal surfacesSurface Science, 1971