Two-Dimensional Concentration Dependent Diffusion
- 1 January 1980
- journal article
- website
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Bell System Technical Journal
- Vol. 59 (1) , 1-41
- https://doi.org/10.1002/j.1538-7305.1980.tb02992.x
Abstract
The concentration dependent diffusion problem is studied in two dimensions for a variety of cases relevant to the fabrication of narrow-channel MOS transistors. A method for solving the partial differential equation is presented which allowed the sol...Keywords
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