Novel fingerprint scanning arrays using polysilicon TFT's on glass and polymer substrates
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 18 (1) , 19-20
- https://doi.org/10.1109/55.553063
Abstract
Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and two poly-Si thin film transistors for addressing and read out. The devices were fabricated on glass, polyimide and polyethersulphone substrates using a low temperature (<250/spl deg/C) process.Keywords
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