Defect-excitation processes involved in laser-induced atomic emission and laser ablation of nonmetallic solids

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Abstract
A microscopic theory of defect-induced emission of atoms from nonmetallic surfaces is presented. The results agree very well with the experimental results for the emission yield with the number of laser shots, laser fluence, and incident photon energy. Our results show that the emission of atoms at low photon energy and laser fluence originates only from the surface defects like adatoms and steps. Such emissions cannot be observed from the defect-free surfaces of semiconductors considered here.