Effect of energetic particles on island formation in sputter deposition of Pt on Pt(111)
- 13 January 1997
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 70 (2) , 182-184
- https://doi.org/10.1063/1.118351
Abstract
During ion beamsputter deposition besides the deposited atoms, which reach the substrate with kinetic energies in the 10 eV range, a certain amount of energetic particles also hit the substrate. These particles which have been reflected or sputtered at the target represent only a small fraction of the atoms reaching the substrate, but have energies of the order of the sputteringbeam. The influence of these particles on the island formation of Pt films on a Pt(111) surface has been examined by variation of the deposition geometry, the primary ion energy, and the substrate temperature. It is demonstrated that the main effect is a dramatic increase in island density. The experimental results are in quantitative agreement with the results of a newly developed computer code.Keywords
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