Defect compensation in doped CVD amorphous silicon
- 29 February 1980
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 35-36, 297-302
- https://doi.org/10.1016/0022-3093(80)90610-9
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Electronic properties of chemically deposited polycrystalline siliconJournal of Applied Physics, 1979
- Doping and annealing effects on ESR in chemically vapor deposited amorphous siliconSolid State Communications, 1979
- Substitutional doping of chemically vapor-deposited amorphous siliconJournal of Crystal Growth, 1978
- Negative-States in the Gap in Hydrogenated Amorphous SiliconPhysical Review Letters, 1978
- Coordination of Arsenic Impurities in Amorphous Silicon-Hydrogen AlloysPhysical Review Letters, 1977
- Electronic properties of substitutionally doped amorphous Si and GePhilosophical Magazine, 1976
- Defects in Irradiated Silicon: Electron Paramagnetic Resonance of the DivacancyPhysical Review B, 1965