Production of Electron-Free Plasma by Using a Magnetic Filter in Radio Frequency Discharge
- 1 October 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (10R) , 2601-2605
- https://doi.org/10.1143/jjap.30.2601
Abstract
A source plasma is generated in a multipole-type device in oxygen by a radio frequency discharge at 13.56 MHz. A SmCo magnet array is mounted between source and target plasma sections as a magnetic filter. In the target section, almost electron-free plasma is obtained. The device can be operated in the pressure range of 10-3 to 10-1 Torr. The plasma densities in source and target plasmas are 109-1010 cm-3 and 108-109 cm-3, respectively.Keywords
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