Image scanning ellipsometry for measuring nonuniform film thickness profiles
- 1 March 1994
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 33 (7) , 1223-1229
- https://doi.org/10.1364/ao.33.001223
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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