Multifunctional AFM/SNOM cantilever probes: Fabrication and measurements
- 30 June 2000
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 53 (1-4) , 183-186
- https://doi.org/10.1016/s0167-9317(00)00292-6
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Multipurpose sensor tips for scanning near-field microscopyApplied Physics Letters, 1996
- Microfabrication of near-field optical probesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Near-field optics: light for the world of nano-scale scienceThin Solid Films, 1995
- A micropipette force probe suitable for near-field scanning optical microscopyReview of Scientific Instruments, 1992
- Combined shear force and near-field scanning optical microscopyApplied Physics Letters, 1992
- Simultaneous measurement of lateral and normal forces with an optical-beam-deflection atomic force microscopeApplied Physics Letters, 1990